Development of a Micro-step XY.THETA. Stage Using Piezoelectric Tube Actuators.
نویسندگان
چکیده
منابع مشابه
Modeling of Piezoelectric Tube Actuators
A new dynamic model is presented for piezoelectric tube actuators commonly used in high-precision instruments. The model captures coupling between motions in all three axes such as bending motion due to a supposedly pure extension of the actuator. Both hysteresis and creep phenomena are included in the overall actuator model permitting modeling nonlinear sensitivity in the voltage to displaceme...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 1994
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.60.1736